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ZJUS-A
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2003, Vol. 4 Issue (1): 53-57    DOI: 10.1631/jzus.2003.0053
Information & Computer Technology     
Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump
XIE Hai-bo, FU Xin, YANG Hua-yong
The State Key Laboratory of Fluid Power Transmission & Control,Zhejiang University,Hangzhou 310027, China
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Abstract  The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser parameters on the output flow rate of the micro valveless pump. The experiments were carried out with different structural parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference for structure optimization selection of the driving diaphragm of micro valveless pump.

Key words： Micro valveless pump      MEMS      Driving diaphragm      Optimal design     
Received: 25 November 2001     
CLC:  TH137  
  TH39  
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FU Xin
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XIE Hai-bo, FU Xin, YANG Hua-yong. Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2003, 4(1): 53-57.

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http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.2003.0053     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2003/V4/I1/53

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