Please wait a minute...
ZJUS-A
Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering)  2002, Vol. 3 Issue (3): 263-267    DOI: 10.1631/jzus.2002.0263
Energy & Environmental Engineering     
Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool
CHEN Zong-nong, GUO Ming, WANG Qing-jiu, YU Xue-gong
Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, China; National High-Purity Silicon & Silicane Key Lab, Zhejiang University, Hangzhou 310027, China
Download:     PDF (0 KB)     
Export: BibTeX | EndNote (RIS)      

Abstract  The structure characteristics of ID precision ultrathin monocrystalline silicon section cutting machine-tool spindle with force-monitoring bearings functioning as force measuring sensors were detected with the new Hilbert theory based signal-wave envelope detection method, presented to replace the conventional hardware device in order to ensure that the signal is measured online with high fidelity. According to the probability of anomalous incidents in the cutting process, a mathematical recognition model has been designed and verified on an STC-22ID machine.

Key words： Machine-tool spindle      Bearing      Monocrystalline silicon section      Signal analysis     
Received: 26 May 2001     
CLC:  TH161.5  
Service
E-mail this article
Add to my bookshelf
Add to citation manager
E-mail Alert
RSS
Articles by authors
CHEN Zong-nong
GUO Ming
WANG Qing-jiu
YU Xue-gong
Cite this article:

CHEN Zong-nong, GUO Ming, WANG Qing-jiu, YU Xue-gong. Novel method for detection of anomalous structure characteristics of ID precision ultrathin monocrystalline silicon section cutting tool. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2002, 3(3): 263-267.

URL:

http://www.zjujournals.com/xueshu/zjus-a/10.1631/jzus.2002.0263     OR     http://www.zjujournals.com/xueshu/zjus-a/Y2002/V3/I3/263

[1] Yi-feng Wu, Hao Wang, Ai-qun Li, Dong-ming Feng, Ben Sha, Yu-ping Zhang. Explicit finite element analysis and experimental verification of a sliding lead rubber bearing[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2017, 18(5): 363-376.
[2] Liang Ma, Jun-hong Zhang, Jie-wei Lin, Jun Wang, Xin Lu. Dynamic characteristics analysis of a misaligned rotor–bearing system with squeeze film dampers[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2016, 17(8): 614-631.
[3] Hossein Rezaei, Ramli Nazir, Ehsan Momeni. Bearing capacity of thin-walled shallow foundations: an experimental and artificial intelligence-based study[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2016, 17(4): 273-285.
[4] Ting-chun Li, Lian-xun Lyu, Shi-lin Zhang, Jie-cheng Sun. Development and application of a statistical constitutive model of damaged rock affected by the load-bearing capacity of damaged elements[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2015, 16(8): 644-655.
[5] Lin Ba, Zhen-peng He, Yue-hui Liu, Gui-chang Zhang. Analysis of piston-pin lubrication considering the effects of structure deformation and cavitation[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2015, 16(6): 443-463.
[6] Lei Fu, Zhen-ping Feng, Guo-jun Li, Qing-hua Deng, Yan Shi, Tie-yu Gao. Experimental validation of an integrated optimization design of a radial turbine for micro gas turbines[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2015, 16(3): 241-249.
[7] Zhou-hong Zong, Rui Zhou, Xue-yang Huang, Zhang-hua Xia. Seismic response study on a multi-span cable-stayed bridge scale model under multi-support excitations. Part I: shaking table tests[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2014, 15(5): 351-363.
[8] Zhen-peng He, Jun-hong Zhang, Zhou-yu Li, Lin Ba, Gui-chang Zhang, Kai-nan Wang, Xing Lu. Inter-asperity cavitation for misalignment journal lubrication problem based on mass-conservative algorithm[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2013, 14(9): 642-656.
[9] Jia-jin Zhou, Kui-hua Wang, Xiao-nan Gong, Ri-hong Zhang. Bearing capacity and load transfer mechanism of a static drill rooted nodular pile in soft soil areas[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2013, 14(10): 705-719.
[10] Zhen-peng He, Jun-hong Zhang, Wei-song Xie, Zhou-yu Li, Gui-chang Zhang. Misalignment analysis of journal bearing influenced by asymmetric deflection, based on a simple stepped shaft model[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2012, 13(9): 647-664.
[11] Qiang Li, Shu-lian Liu, Xiao-hong Pan, Shui-ying Zheng. A new method for studying the 3D transient flow of misaligned journal bearings in flexible rotor-bearing systems[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2012, 13(4): 293-310.
[12] Chen-xi Xing, Hao Wang, Ai-qun Li, Ji-rong Wu. Design and experimental verification of a new multi-functional bridge seismic isolation bearing[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2012, 13(12): 904-914.
[13] Xiao-biao Shan, Li-li Wang, Tao Xie, Wei-shan Chen. A simple approach for determining the preload of a wire race ball bearing[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(7): 511-519.
[14] Guo-liang Xiong, Long Zhang, He-sheng Liu, Hui-jun Zou, Wei-zhong Guo. A comparative study on ApEn, SampEn and their fuzzy counterparts in a multiscale framework for feature extraction[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(4): 270-279.
[15] R. SHABANI, S. TARIVERDILO, H. SALARIEH. Nonlinear identification of electro-magnetic force model[J]. Journal of Zhejiang University-SCIENCE A (Applied Physics & Engineering), 2010, 11(3): 165-174.