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Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites |
Bin Lin*, Xiao-lang Yan, Zheng Shi, Yi-wei Yang |
Institute of VLSI Design, Zhejiang University, Hangzhou 310027, China |
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Erratum to: A sparse matrix model-based optical proximity correction algorithm with model-based mapping between segments and control sites |
Bin Lin*, Xiao-lang Yan, Zheng Shi, Yi-wei Yang |
Institute of VLSI Design, Zhejiang University, Hangzhou 310027, China |
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