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Front. Inform. Technol. Electron. Eng.  2013, Vol. 14 Issue (3): 222-234    DOI: 10.1631/jzus.C1200297
    
Novel serpentine structure design method considering confidence level and estimation precision
Li-sheng Chen, Xiao-hua Luo, Jiao-jiao Zhu, Fan-chao Jie, Xiao-lang Yan
Institute of VLSI Design, Zhejiang University, Hangzhou 310027, China
Novel serpentine structure design method considering confidence level and estimation precision
Li-sheng Chen, Xiao-hua Luo, Jiao-jiao Zhu, Fan-chao Jie, Xiao-lang Yan
Institute of VLSI Design, Zhejiang University, Hangzhou 310027, China
 全文: PDF 
摘要： Due to the importance of metal layers in the product yield, serpentine test structures are usually fabricated on test chips to extract parameters for yield prediction. In this paper, the confidence level and estimation precision of the average defect density on metal layers are investigated to minimize the randomness of experimental results and make the measured parameters more convincing. On the basis of the Poisson yield model, the method to determine the total area of all serpentine test structures is obtained using the law of large numbers and the Lindeberg-Levy theorem. Furthermore, the method to determine an adequate area of each serpentine test structure is proposed under a specific requirement of confidence level and estimation precision. The results of Monte Carlo simulation show that the proposed method is consistent with theoretical analyses. It is also revealed by wafer experimental results that the method of designing serpentine test structure proposed in this paper has better performance.
关键词： Poisson yield model;  Serpentine test structure;  Critical area;  Average defect density;  Confidence level;  Estimation precision    
Abstract: Due to the importance of metal layers in the product yield, serpentine test structures are usually fabricated on test chips to extract parameters for yield prediction. In this paper, the confidence level and estimation precision of the average defect density on metal layers are investigated to minimize the randomness of experimental results and make the measured parameters more convincing. On the basis of the Poisson yield model, the method to determine the total area of all serpentine test structures is obtained using the law of large numbers and the Lindeberg-Levy theorem. Furthermore, the method to determine an adequate area of each serpentine test structure is proposed under a specific requirement of confidence level and estimation precision. The results of Monte Carlo simulation show that the proposed method is consistent with theoretical analyses. It is also revealed by wafer experimental results that the method of designing serpentine test structure proposed in this paper has better performance.
Key words: Poisson yield model    Serpentine test structure    Critical area    Average defect density    Confidence level    Estimation precision
收稿日期: 2012-10-17 出版日期: 2013-03-05
CLC:  TN4  
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Li-sheng Chen
Xiao-hua Luo
Jiao-jiao Zhu
Fan-chao Jie
Xiao-lang Yan

引用本文:

Li-sheng Chen, Xiao-hua Luo, Jiao-jiao Zhu, Fan-chao Jie, Xiao-lang Yan. Novel serpentine structure design method considering confidence level and estimation precision. Front. Inform. Technol. Electron. Eng., 2013, 14(3): 222-234.

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http://www.zjujournals.com/xueshu/fitee/CN/10.1631/jzus.C1200297    或    http://www.zjujournals.com/xueshu/fitee/CN/Y2013/V14/I3/222

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[2] Jiao-jiao Zhu, Xiao-hua Luo, Li-sheng Chen, Yi Ye, Xiao-lang Yan. Scratch-concerned yield modeling for IC manufacturing involved with a chemical mechanical polishing process[J]. Front. Inform. Technol. Electron. Eng., 2012, 13(5): 376-384.