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Electrical characterization of integrated passive devices using thin film technology for 3D integration |
Xin Sun, Yun-hui Zhu, Zhen-hua Liu, Qing-hu Cui, Sheng-lin Ma, Jing Chen, Min Miao, Yu-feng Jin |
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China; Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China; Information Microsystem Institute, Beijing Information Science and Technology University, Beijing 100085, China |
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Electrical characterization of integrated passive devices using thin film technology for 3D integration |
Xin Sun, Yun-hui Zhu, Zhen-hua Liu, Qing-hu Cui, Sheng-lin Ma, Jing Chen, Min Miao, Yu-feng Jin |
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China; Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China; Information Microsystem Institute, Beijing Information Science and Technology University, Beijing 100085, China |
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