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浙江大学学报（理学版）
浙江大学学报（理学版）
物理学     
用传统光学薄膜技术改进菲涅耳波带板
朱精敏　何伟强　赵焕东 (杭州大学物理系　杭州310028) 　尹　行 (德清职业高中　德清310000)
Improving the Fresnel Zone Plate with the Traditional Technique of Optical Thin Film
Zhu Jingmin 　He Weiqiang 　Zhao Huandong (Physics Depar tment of Hangzhou University , Hangzhou 310028) Yin Hang (Deqing Professio n High School, Deqing 313200)
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摘要： 利用二元光学理论改进菲涅耳波带板, 能大幅度提高衍射效率.本文介绍利用传统的照相复制和真空镀膜技术制作位相型菲涅耳波带板的方法, 指出了膜料选择和膜厚控制的依据, 实测了位相台阶数为2时的衍射效率, 为通常菲涅耳波带板的近4 倍.
关键词： :菲涅耳波带板;  光刻;  真空蒸发;  衍射效率    
Abstract: Using the theory of binary optics to improve the Fresnel zone plate , one can raise its diffraction efficiency greatly . This paper introduces the manufacture method of phase type Fresnel zone plate using the traditional technique of photog rav ure and vacuum vaporization coating .The bases for the choo sing of film material and for the controling of the film thickness are pointed out .The diffractio n efficiency for tha t the phase step number is 2 was measured, that is equal to about 4 times of usual Fresnel zo ne plate .
Key words: Fresnel zone plate    photog ravure    vacuum vapo rization    diffraction efficiency
出版日期: 2017-05-23
:  O435  
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朱精敏　何伟强　赵焕东 尹　行

引用本文:

朱精敏　何伟强　赵焕东 尹　行. 用传统光学薄膜技术改进菲涅耳波带板[J]. 浙江大学学报（理学版）, .

Zhu Jingmin 　He Weiqiang 　Zhao Huandong Yin Hang. Improving the Fresnel Zone Plate with the Traditional Technique of Optical Thin Film. Journal of ZheJIang University(Science Edition), .

链接本文:

http://www.zjujournals.com/sci/CN/    或    http://www.zjujournals.com/sci/CN/Y1998/V25/I1/28

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[2] 张晓波. 晶体透镜光线轨迹的一种计算方法[J]. 浙江大学学报（理学版）, 1998, 25(1): 31-35.
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