罗茨泵极限真空度及其预抽时间预测模型研究
Research on prediction models for limiting vacuum degree and its pre-pumping time of Roots pump
罗茨泵极限真空度及其预抽时间预测模型研究 |
| 李玉龙,宋陆昊,刘天涯,宋安然 |
|
Research on prediction models for limiting vacuum degree and its pre-pumping time of Roots pump |
| Yulong LI,Luhao SONG,Tianya LIU,Anran SONG |
| 图3 罗茨泵真空预抽基准容积 |
| Fig.3 Baseline volume of vacuum pre-pumping for Roots pump |
|
|