旋转纳米运动柔性解耦机构的设计与分析

慕锐,赖磊捷

Design and analysis of flexible decoupling mechanism for rotational nano-motion

Rui MU,Leijie LAI

表4 柔性解耦机构扭转柔度实验结果

Table 4 Experimental results of torsional compliance for flexible decoupling mechanisms

机构 旋转角度/rad 扭转柔度/[rad/(N·m)] H9 0.014 8 2.467×10-3 H6 0.009 7 1.617×10-3 H3 0.008 4 1.467×10-3 H0 0.013 6 2.267×10-3