旋转纳米运动柔性解耦机构的设计与分析
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慕锐,赖磊捷
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Design and analysis of flexible decoupling mechanism for rotational nano-motion
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Rui MU,Leijie LAI
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| 表2 各柔性解耦机构的输出柔度 (m/N或rad/(N·m)) |
| Table 2 Output compliance of each flexible decoupling mechanism |
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| 机构 | 柔度 | 有限元仿真值 | 理论计算值 | 相对误差/% |
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| H9 | Cx-Fx | 1.34×10-5 | 1.41×10-5 | 5.2 | | Cy-Fy | 2.43×10-5 | 2.52×10-5 | 3.7 | | Cθz-Mz | 2.52×10-3 | 2.63×10-3 | 4.4 | | H6 | Cx-Fx | 7.45×10-6 | 7.67×10-6 | 2.9 | | Cy-Fy | 1.43×10-5 | 1.52×10-5 | 6.3 | | Cθz-Mz | 1.65×10-3 | 1.71×10-3 | 3.6 | | H3 | Cx-Fx | 4.94×10-6 | 5.13×10-6 | 3.8 | | Cy-Fy | 8.71×10-6 | 8.92×10-6 | 2.4 | | Cθz-Mz | 1.55×10-3 | 1.61×10-3 | 3.9 | | H0 | Cx-Fx | 2.63×10-6 | 2.82×10-6 | 7.2 | | Cy-Fy | 3.24×10-6 | 3.31×10-6 | 2.2 | | Cθz-Mz | 2.33×10-3 | 2.53×10-3 | 8.6 |
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