旋转纳米运动柔性解耦机构的设计与分析
慕锐,赖磊捷

Design and analysis of flexible decoupling mechanism for rotational nano-motion
Rui MU,Leijie LAI
图9 柔性解耦机构平动柔度实验结果
Fig.9 Experimental results of translational compliance for flexible decoupling mechanism