旋转纳米运动柔性解耦机构的设计与分析
慕锐,赖磊捷
Design and analysis of flexible decoupling mechanism for rotational nano-motion
Rui MU,Leijie LAI
图6
柔性解耦机构
H6
的坐标系建立
Fig.6
Coordinate system establishment of flexible decoupling mechanism H6