旋转纳米运动柔性解耦机构的设计与分析
慕锐,赖磊捷

Design and analysis of flexible decoupling mechanism for rotational nano-motion
Rui MU,Leijie LAI
图6 柔性解耦机构H6的坐标系建立
Fig.6 Coordinate system establishment of flexible decoupling mechanism H6