旋转纳米运动柔性解耦机构的设计与分析

慕锐,赖磊捷

Design and analysis of flexible decoupling mechanism for rotational nano-motion

Rui MU,Leijie LAI

图4 柔性解耦机构H9的关键尺寸参数与坐标系

Fig.4 Key dimensional parameters and coordinate systems of flexible decoupling mechanism H9