旋转纳米运动柔性解耦机构的设计与分析

慕锐,赖磊捷

Design and analysis of flexible decoupling mechanism for rotational nano-motion

Rui MU,Leijie LAI

图3 圆弧梁的局部坐标系和流动坐标系

Fig.3 Local coordinate system and mobile coordinate system of arc beam