二维压电精密运动平台行程与频率的协同优化设计

张萌,朱禹清,杨培基,吴垚

Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage

Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU

表3 精密运动平台的位移放大倍数

Table 3 Displacement amplification ratio of precision motion stage

输入位移/μm 输出位移/μm 位移放大倍数 2.4 6.6 2.750 3.5 8.7 2.486 4.2 11.1 2.643 4.5 13.6 3.022 6.2 16.5 2.661 6.9 19.3 2.797 7.4 21.6 2.919 8.2 23.7 2.890