二维压电精密运动平台行程与频率的协同优化设计 |
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| 张萌,朱禹清,杨培基,吴垚 | ||||||||||||||||
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Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage |
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| Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU | ||||||||||||||||
| 表1 不同柔性铰链数量对精密运动平台性能的影响 | ||||||||||||||||
| Table 1 Effect of different numbers of flexure hinges on performance of precision motion stage | ||||||||||||||||
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