二维压电精密运动平台行程与频率的协同优化设计

张萌,朱禹清,杨培基,吴垚

Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage

Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU

图17 精密运动平台输入、输出位移及其线性拟合误差

Fig.17 Input and output displacements of precision motion stage and their linear fitting errors