二维压电精密运动平台行程与频率的协同优化设计
Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage
二维压电精密运动平台行程与频率的协同优化设计 |
| 张萌,朱禹清,杨培基,吴垚 |
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Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage |
| Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU |
| 图13 精密运动平台的三阶模态分析结果 |
| Fig.13 Third-order modal analysis result of precision motion stage |
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