二维压电精密运动平台行程与频率的协同优化设计

张萌,朱禹清,杨培基,吴垚

Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage

Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU

图8 柔性铰链高度对精密运动平台性能的影响

Fig.8 Influence of flexure hinge height on performance of precision motion stage