二维压电精密运动平台行程与频率的协同优化设计
Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage
二维压电精密运动平台行程与频率的协同优化设计 |
| 张萌,朱禹清,杨培基,吴垚 |
|
Co-optimization design of stroke and frequency for two-dimensional piezoelectric precision motion stage |
| Meng ZHANG,Yuqing ZHU,Peiji YANG,Yao WU |
| 图3 杆式构型放大原理 |
| Fig.3 Amplification principle of lever-type configuration |
|
|