基于压电陶瓷驱动的二维精密定位平台设计及分析

杜健,祝锡晶,李婧

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

Jian DU,Xijing ZHU,Jing LI

图12 不同驱动电压下精密定位平台的输入、输出位移

Fig.12 Input and output displacement of precision positioning platform under different driving voltages