基于压电陶瓷驱动的二维精密定位平台设计及分析

杜健,祝锡晶,李婧

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

Jian DU,Xijing ZHU,Jing LI

图10 精密定位平台样机

Fig.10 Precision positioning platform prototype