基于压电陶瓷驱动的二维精密定位平台设计及分析

杜健,祝锡晶,李婧

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

Jian DU,Xijing ZHU,Jing LI

图9 精密定位平台的前两阶模态

Fig.9 The first two modes of precision positioning platform