基于压电陶瓷驱动的二维精密定位平台设计及分析
Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive
基于压电陶瓷驱动的二维精密定位平台设计及分析 |
| 杜健,祝锡晶,李婧 |
|
Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive |
| Jian DU,Xijing ZHU,Jing LI |
| 图7 精密定位平台沿 y 方向的运动位移 |
| Fig.7 Motion displacement of precision positioning platform along y-direction |
|
|