基于压电陶瓷驱动的二维精密定位平台设计及分析
Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive
基于压电陶瓷驱动的二维精密定位平台设计及分析 |
| 杜健,祝锡晶,李婧 |
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Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive |
| Jian DU,Xijing ZHU,Jing LI |
| 图6 精密定位平台质量分布示意 |
| Fig.6 Mass distribution schematic of precision positioning platform |
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