基于压电陶瓷驱动的二维精密定位平台设计及分析

杜健,祝锡晶,李婧

Design and analysis of two-dimensional precision positioning platform based on piezoelectric ceramic drive

Jian DU,Xijing ZHU,Jing LI

图5 运动导向机构和柔性梁的尺寸参数

Fig.5 Dimensional parameters of motion guidance mechanism and flexible beam