音圈电机驱动的三自由度大行程柔性偏摆台设计与分析

徐智皓,陆晓伟,谢雨欣,赖磊捷

Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor

Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI

表4 偏摆台柔度的计算值与实测值对比

Table 4 Comparison between calculated and measured values of compliance of tip-tilt stage

对比项

$C_{δ Z}$ /

(mm/N)

$C_{θ X}$ /

［rad/(N·m)］

$C_{θ Y}$ /

［rad/(N·m)］

相对误差/%

8.88

1.76

3.32

计算值

0.044 76

0.006 70

实测值

0.041 11

0.006 82

0.006 93