音圈电机驱动的三自由度大行程柔性偏摆台设计与分析 |
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| 徐智皓,陆晓伟,谢雨欣,赖磊捷 | ||||||||||||
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Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor |
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| Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI | ||||||||||||
| 表2 驱动支链结构参数取值 (mm) | ||||||||||||
| Table 2 Values of structural parameters of driving chain | ||||||||||||
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