音圈电机驱动的三自由度大行程柔性偏摆台设计与分析
Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor
音圈电机驱动的三自由度大行程柔性偏摆台设计与分析 |
| 徐智皓,陆晓伟,谢雨欣,赖磊捷 |
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Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor |
| Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI |
| 图9 偏摆台整体柔度计算模型 |
| Fig.9 Overall compliance calculation model of tip-tilt stage |
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