音圈电机驱动的三自由度大行程柔性偏摆台设计与分析

徐智皓,陆晓伟,谢雨欣,赖磊捷

Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor

Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI

图7 柔性球铰中各簧片梁的连接关系及其局部坐标系

Fig.7 Connection relationship and local coordinate system of each reed beam in flexible spherical hinge