音圈电机驱动的三自由度大行程柔性偏摆台设计与分析

徐智皓,陆晓伟,谢雨欣,赖磊捷

Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor

Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI

图6 柔性球铰的剖面结构和结构参数

Fig.6 Section structure and structural parameters of flexible spherical hinge