音圈电机驱动的三自由度大行程柔性偏摆台设计与分析
Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor
音圈电机驱动的三自由度大行程柔性偏摆台设计与分析 |
| 徐智皓,陆晓伟,谢雨欣,赖磊捷 |
|
Design and analysis of three-degree-of-freedom large-stroke flexible tip-tilt stage driven by voice coil motor |
| Zhihao XU,Xiaowei LU,Yuxin XIE,Leijie LAI |
| 图3 簧片型柔性球铰变形原理 |
| Fig.3 Deformation principle of reed-type flexible spherical hinge |
|
|