基于3D-motif法的刮研表面形貌表征
杨春鹏(),王立华(),陈谢瑞,蒋维
Characterization of scraped surface morphology based on 3D-motif method
Chunpeng YANG(),Lihua WANG(),Xierui CHEN,Wei JIANG

图2. LI-3型接触式三维表面形貌测量仪

Fig.2. LI-3 contact three-dimensional surface morphology measuring instrument