高带宽压电片变形镜的动力学仿真与优化方法研究
杨开科(
),罗俊鹏,马文静,耿远超,王德恩(),袁强
),罗俊鹏,马文静,耿远超,王德恩(),袁强
Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror
Kaike YANG(),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
图11. 压电片变形镜驱动位移响应速度测量方案
Fig.11. Measurement scheme for actuation displacement response speed of unimorph piezoelectric deformable mirror
