高带宽压电片变形镜的动力学仿真与优化方法研究
杨开科(
),罗俊鹏,马文静,耿远超,王德恩(),袁强
),罗俊鹏,马文静,耿远超,王德恩(),袁强
Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror
Kaike YANG(),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
图9. 压电片变形镜表面形状测量光路
Fig.9. Optical path for measuring surface shape of unimorph piezoelectric deformable mirror
