高带宽压电片变形镜的动力学仿真与优化方法研究
杨开科(
),罗俊鹏,马文静,耿远超,王德恩(),袁强
),罗俊鹏,马文静,耿远超,王德恩(),袁强
Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror
Kaike YANG(),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
图5. 多维设计参数对应的压电片变形镜仿真性能
Fig.5. Simulated performance of unimorph piezoelectric deformable mirror corresponding to multi-dimensional design parameters
