高带宽压电片变形镜的动力学仿真与优化方法研究
杨开科(
),罗俊鹏,马文静,耿远超,王德恩(),袁强
),罗俊鹏,马文静,耿远超,王德恩(),袁强
Research on dynamics simulation and optimization method for high-bandwidth unimorph piezoelectric deformable mirror
Kaike YANG(),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
),Junpeng LUO,Wenjing MA,Yuanchao GENG,Deen WANG(),Qiang YUAN
图3. 压电片变形镜多维设计参数优化流程
Fig.3. Optimization flow for multi-dimensional design parameters of unimorph piezoelectric deformable mirror
