基于数字孪生的光学位移台交互控制系统 |
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| 徐哲,孙树峰,张兴波,王茜,张丰云,王萍萍,谢章伟,张羽,刘纪新,孙维丽,曹爱霞 | ||||||||||
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Interactive control system of optical displacement stage based on digital twin |
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| Zhe XU,Shufeng SUN,Xingbo ZHANG,Xi WANG,Fengyun ZHANG,Pingping WANG,Zhangwei XIE,Yu ZHANG,Jixin LIU,Weili SUN,Aixia CAO | ||||||||||
| 表1 数字孪生控制系统的性能要求 | ||||||||||
| Table 1 Performance requirements for digital twin control system | ||||||||||
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