基于数字孪生的光学位移台交互控制系统

徐哲,孙树峰,张兴波,王茜,张丰云,王萍萍,谢章伟,张羽,刘纪新,孙维丽,曹爱霞

Interactive control system of optical displacement stage based on digital twin

Zhe XU,Shufeng SUN,Xingbo ZHANG,Xi WANG,Fengyun ZHANG,Pingping WANG,Zhangwei XIE,Yu ZHANG,Jixin LIU,Weili SUN,Aixia CAO

图6 光学位移台的运动精度测试数据

Fig.6 Test data of motion accuracy of optical displacement stage