基于数字孪生的光学位移台交互控制系统

徐哲,孙树峰,张兴波,王茜,张丰云,王萍萍,谢章伟,张羽,刘纪新,孙维丽,曹爱霞

Interactive control system of optical displacement stage based on digital twin

Zhe XU,Shufeng SUN,Xingbo ZHANG,Xi WANG,Fengyun ZHANG,Pingping WANG,Zhangwei XIE,Yu ZHANG,Jixin LIU,Weili SUN,Aixia CAO

图2 光学位移台数字孪生模型

Fig.2 Digital twin model of optical displacement stage