雾化辅助CVD腔体的优化设计与实现

樊俊良,肖黎,罗月婷,陈刚,瞿小林,唐毅,龚恒翔

Optimization design and implementation of atomization assisted CVD cavity

Junliang FAN,Li XIAO,Yueting LUO,Gang CHEN,Xiaolin QU,Yi TANG,Hengxiang GONG

图4 温控加热台结构

Fig.4 Structure of temperature-controlled heating table