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工程设计学报  2003, Vol. 10 Issue (5): 271-274    
工程设计理论、方法与技术     
大气下空气滑膜阻尼对微机械惯性传感器的影响
 董林玺1,2, 焦继伟2, 陈永2, 王跃林1,2
1.浙江大学信息与电子工程学系,浙江杭州310027;
2.中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050
Effect of air slide-film damping on micromechanical sensor at atmosphere
 DONG  Lin-Xi1,2, JIAO  Ji-Wei2, CHEN  Yong2, WANG  Yue-Lin1,2
1.Department of Information Science&Electronic Engineering,Zhejiang University,Hangzhou 310027,China;
2.State Key Laboratory of Transducer Technology,Shanghai Institute of M icrosystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China
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摘要: 设计并制作了一种可在大气下工作的栅结构电容式微机械加速度传感器,并对其空气滑膜阻尼特性进行了研究.测试结果表明该种结构机械品质因子Q值在大气压下能达到504.这种具有高Q值的栅形电容检测结构可以应用到微机械陀螺的检测模式,它无需真空封装,可以在大气环境下工作,且灵敏度提高.对陀螺原型的测试结构表明,其在大气下检测模态的Q值可以达到715。
关键词: 滑膜阻尼电容检测栅形结构    
Abstract: The authors design and fabricate a new bar capacitive micro-mechanical accelerometer.Its air slide—film damping is studied.The test results indicate that the quality factor Q of the bar structure accelerometer is 504.The bar capacitive testing structure having high Q can be used in the tesing mode of micromechanical gyroscope which is not necessary to be encapsulated in the vacuum ,can work at the atmosphere having high Q.The testing result of the gyroscope having bar structure indicate that the Q can reach 715 in the atmosphere environment.
Key words: air slide-film damping    capacitive test    bar structure
出版日期: 2003-10-28
基金资助:

国家“863”计划资助项目(2002AA404410)

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引用本文:

董林玺, 焦继伟, 陈永, 王跃林. 大气下空气滑膜阻尼对微机械惯性传感器的影响[J]. 工程设计学报, 2003, 10(5): 271-274.

DONG Lin-Xi, JIAO Ji-Wei, CHEN Yong, WANG Yue-Lin. Effect of air slide-film damping on micromechanical sensor at atmosphere[J]. Chinese Journal of Engineering Design, 2003, 10(5): 271-274.

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https://www.zjujournals.com/gcsjxb/CN/        https://www.zjujournals.com/gcsjxb/CN/Y2003/V10/I5/271

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