基于内蕴旋转对称性的器件瑕疵检测

周涛,王鹏飞,高伟杰

Device defect detection based on intrinsic rotational symmetry

Tao ZHOU,Pengfei WANG,Weijie GAO

图 7 大瑕疵区域优化结果

Fig.7 Optimization results for large defect regions