基于内蕴旋转对称性的器件瑕疵检测

周涛,王鹏飞,高伟杰

Device defect detection based on intrinsic rotational symmetry

Tao ZHOU,Pengfei WANG,Weijie GAO

图 6 优化迭代过程中各能量项收敛特性

Fig.6 Energy terms convergence characteristics during optimization iterations