基于内蕴旋转对称性的器件瑕疵检测
Device defect detection based on intrinsic rotational symmetry
基于内蕴旋转对称性的器件瑕疵检测 |
| 周涛,王鹏飞,高伟杰 |
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Device defect detection based on intrinsic rotational symmetry |
| Tao ZHOU,Pengfei WANG,Weijie GAO |
| 图 2 模型瑕疵区域与非瑕疵区域的向量共面特征示意图 |
| Fig.2 Vector coplanarity characteristics schematic for defective and defect-free model regions |
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