基于内蕴旋转对称性的器件瑕疵检测

周涛,王鹏飞,高伟杰

Device defect detection based on intrinsic rotational symmetry

Tao ZHOU,Pengfei WANG,Weijie GAO

图 1 内蕴旋转对称性原理示意图

Fig.1 Intrinsic rotational symmetry principle illustration