氧化铝增强的PdSe2/Si异质结光电探测器

贺亦菲,杨德仁,皮孝东

Enhanced PdSe2/Si heterojunction photodetector by Al2O3 layer

Yi-fei HE,De-ren YANG,Xiao-dong PI

图 2 ALD生长的Al2O3薄膜的XPS图谱

Fig.2 XPS spectra of Al2O3 films grown by ALD