基于LSTM与牛顿迭代的两轴系统轮廓误差控制

黄华,赵秋舸,何再兴,李嘉然

Contour error control of two-axis system based on LSTM and Newton iteration

Hua HUANG,Qiu-ge ZHAO,Zai-xing HE,Jia-ran LI

表 3 轮廓误差控制的对比

Tab.3 Comparison of contour error control

方法 ${\left| { { {\boldsymbol{\varepsilon } }_{\rm{d}}} } \right|_{ \rm{rms} } }$/μm ${\left| { { {\boldsymbol{\varepsilon } }_{\rm{d}}} } \right|_{ {\max} } }$/μm C1 109.1 489 C2 83.5 468 C3 93.7 150 C4 11.4 195 C5 8.2 76.6 C6 9.1 75.4