分级倾斜微圆柱结构的高灵敏度柔性触觉传感器

郭小辉,洪炜强,郑国庆,王景溢,唐国鹏,杨金阳,卓超强,许耀华,赵雨农,张红伟

High sensitivity flexible tactile sensor with hierarchical tilted micro-pillar structure

Xiao-hui GUO,Wei-qiang HONG,Guo-qing ZHENG,Jing-yi WANG,Guo-peng TANG,Jin-yang YANG,Chao-qiang ZHUO,Yao-hua XU,Yu-nong ZHAO,Hong-wei ZHANG

图 3 传感器阵列制备流程示意图

Fig.3 Schematic diagram of preparation process of sensor array