光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

图 7 不同驱动电压下上电极末端位移与力矩的关系

Fig.7 Relation between displacement of upper electrode tip and torque under different driving voltages