光电-静电复合驱动器的驱动性能

吕振,王新杰,刘亚风,赵勇筌

Driving performance of photovoltaic-electrostatic hybrid actuator

Zhen LV,Xin-jie WANG,Ya-feng LIU,Yong-quan ZHAO

图 6 光电-静电复合驱动器输出位移闭环控制的流程框图

Fig.6 Flow chart of closed-loop control of output displacement for photovoltaic electrostatic hybrid actuator